730 VACUUM CAPACITANCE MANOMETER

Setra’s Model 730 is a high accuracy capacitance manometer (also referred to as Capacitance Diaphragm Gauge (CDG)), for measuring low vacuum pressure ranges that are critical to the control of the processes in photovoltaic, semiconductor and industrial markets. Its ±0.5% of reading accuracy and precise resolution make the 730 the preferred choice over the competition. The 730 utilizes all Inconel® wetted material which enables it to be used with the aggressive media in semiconductor processes. The direct measurement design of the 730 provides accurate measurements of the media regardless of the composition of the gas mixture in the application.

Features & Benefits

• High Accuracy: ±0.25% of Reading
• Tensioned Diaphragm Provides Superior Performance
• Wide Compensated Operating Temperature
• Fast Response Time With Low Circuit Noise
• Not Sensitive to Environmental Changes
• Exceptional Overpressure Design
• CE & RoHS Compliant

Applications

• Semiconductor Process Chambers
• Petrochemical
• Plasma Sterilizers
• Vacuum Packaging