U802 LIQUID FLOW CONTROLLER

The Model U802 Ultra-High-Purity (UHP) FLO-CONTROLLER will precisely measure and control flow rates of virtually any fluid as low as 15 mL/minute or as high as 10 LPM. Repeatable results are achieved by utilizing a patented microturbine flow sensor design. This controller integrates all electronics and fluid components into a single package, eliminating the need for any external modules.

The Model U802 UHP FLO-CONTROLLER integrates a proportional double-diaphragm valve to accurately control flow rate. McMillan design insures long life expectancy under normal operating conditions - millions of cycles with no valve degradation.

±1.0% full-scale accuracy (including linearity & hysteresis) provides the critical control required for modern microelectronic applications. Unparalleled repeatability reassures process engineers that results will be consistent.

An optional temperature rating of 0-90°C allows use in most UHP applications.