RHODIUM GAS MASS FLOW CONTROLLERS

MEMS-Based Mass Flow Controllers for Gas Applications

McMillan RHODIUM Series Flow Controllers are capable of measuring and controlling virtually any clean, dry gas as low as 0-50 sccm or as high as 0-20 Lpm. Repeatable results are achieved using a platinum-based microelectromechanical system (MEMS) flow rate sensor device that is manufactured with extreme precision to ensure consistent results from unit to unit.

To actively control flow rate, RHODIUM units leverage a high precision PID controller to control a fast-acting solenoid valve. Analog inputs enable direct, fast, and accurate control of the gas flow. Integrated analog outputs report current flow rate for monitoring and control verification.

Compared to conventional mass flow controllers, RHODIUM Series Flow Controllers offer smaller size, higher accuracy, larger turn-down ratios, and faster response times.

Key Features & Benefits:

• Mounting - The RHODIUM Series has two female threaded ports on the bottom of the device that accept M4 bolts. An optional mounting plate is available to accommodate installation from the topside.
• Calibration - The RHODIUM Series is calibrated in the vertical position. All other positions can cause offset depending on pressure and gas conditions. Flow is unidirectional and must pass through the unit as indicated on the device. All units are calibrated with and for dry nitrogen (N2). Calibration for other gases may be available – please contact us for assistance.
• Wiring - A male 9-pin D-sub connector is provided for all power and signal connections. Optional accessories include a mating cable with pigtail leads (9941-1-2M), a connection block that provides screw-down terminals and a port for a power adapter (9941-3), and 120/240 VAC power adapters that can be used with the connection block (9681-4 or 9691-4).
• Power - RHODIUM Series units require 24VDC power and typically draw less than 250 mA of current.
• Signal - Two I/O signal configurations are available: 0-5 VDC or 4-20mA. In either case, the lower end of the range represents zero flow (0 VDC or 4 mA) and the high end of the range represents 100% rated flow (5 VDC or 20 mA).
• Fluid Connections - Each unit features female SAE 9/16-18 straight thread ports for the inlet and outlet. Optional fittings are available with either ¼” or 3/8” stainless steel (316L) tube connections.

Thermal mass flow controllers feature fast response, virtually zero maintenance, and precise measurement. These are all very important qualities among today’s variety of applications. The McMillan RHODIUM Series Mass Flow Controllers utilise MEMS thermal sensing technology.

MEMS technology utilizes a compact, reliable CMOS (Complementary Metal Oxide Semiconductor) sensor. This no-drift sensor module is comprised of both the electronic and mechanical elements on a single silicon chip, similar to the process used for integrated circuits.

For more detailed information and specifications, please click below to download our product datasheet.